Week 8:3.5 Focussed ion beam lithography, 3.6 Transfer techniques 3.6.1 Etching, Lift-off
Lesson Plan:
Lecture 1:
Focussed ion beam lithography
- construction
- working
Lecture 2:
Focussed ion beam lithography
- advantages
- disadvantages
Lecture 3:
Transfer techniques
- Etching
- Lift-off