Week 8:3.5 Focussed ion beam lithography, 3.6 Transfer techniques 3.6.1 Etching, Lift-off

Lesson Plan:

Lecture 1: 

Focussed ion beam lithography

  • construction
  • working

Lecture 2:

Focussed ion beam lithography

  • advantages
  • disadvantages

 

Lecture 3:

Transfer techniques

  •  Etching
  • Lift-off