Week 5: 2.2.2 Molecular beam epitaxy (MBE), 2.2.3 Sputter deposition, 2.2.4 Chemical vapour deposition
Lesson Plan:
Lecture 1:
- Types of Epitaxial growth
- Molecular beam epitaxy (MBE)
Lecture 2:
Sputter deposition
- DC Sputtering
- AC Sputtering
Lecture 3:
- Chemical vapour deposition