Week 5: 2.2.2 Molecular beam epitaxy (MBE), 2.2.3 Sputter deposition, 2.2.4 Chemical vapour deposition

Lesson Plan:

Lecture 1: 

  • Types of Epitaxial growth
  • Molecular beam epitaxy (MBE)

Lecture 2:

Sputter deposition

  • DC Sputtering
  • AC Sputtering

 

Lecture 3:

  •  Chemical vapour deposition