Week 6: 2.2.5 Electron beam evaporation (EBE) . Chapter#3 Lithography, 3.1 structures fabrication techniques 3.2 Optical lithography
Lesson Plan:
Lecture 1:
Electron beam evaporation (EBE)
Lecture 2:
Studying (a) Lithography, structures fabrication techniques
Lecture 3:
Optical lithography
- specimen preparation
- applying photo resist
- prebake
- uv exposure
- post back
- patteren transfer