Week 6: 2.2.5 Electron beam evaporation (EBE) . Chapter#3 Lithography, 3.1 structures fabrication techniques 3.2 Optical lithography

Lesson Plan:

Lecture 1: 

Electron beam evaporation (EBE)

Lecture 2:

Studying (a) Lithography,  structures fabrication techniques 

 

Lecture 3:

Optical lithography

  • specimen preparation
  • applying photo resist
  • prebake
  • uv exposure
  • post  back
  • patteren transfer