Week 6: Plasma Chemistry
Most plasma treatments are based on surface processes. They rely on a synergy of physical bombardment of the surface and chemically reactive species, such as radicals. Electrons determine process such as excitation, ionization, and dissociation governing the chemically reactive species. Physical bombardment of substrates is primarily through energetic ion impact.
The chemical reactions in a plasma reactor can be classified into homogeneous and heterogeneous reactions. The homogeneous reactions occur between species in the gaseous phase as the result of inelastic collisions between electrons and heavy species or collisions between heavy species. Heterogeneous reactions occur between the plasma species and the solid surfaces immersed or in contact with the plasma.
- Week 1: Introduction
- Wee k 2: Concept of a Distribution Function, Forms of the Distribution Function
- Week 3: Interactions between Charged Particles, Plasma Parameter, Defining Characteristics of a Plasma
- Week 4: Collisions, Elastic collisions, Inelastic collisions
- week 5: Creating a low temperature plasma
- Week 6: Plasma Chemistry
- Week 7: Fluid plasma description
- Week 8: Electrical breakdown, Secondary electron emission and avalanches, Townsend’s theory
- Week 9: Paschen’s law, Minimum breakdown voltage, Self sustaining glow discharge, Discharge structure, DC discharges
- Week 10:Sheath formation in a dc discharge, Sheath potential at a floating wall, DC magnetron discharges, Pulsed DC discharges
- Chapters 10
- Department Physics
- Teacher
Dr. Safdar Hussain
