Thin Film Physics-Surface Preparation

Week No. 1:

Topics: Introduction to course and program, Basic concepts of Thin Film Physics. Surface Preparation. External Cleaning.

Book Readings: Chapter 3, pages 93-115. Handbook of Deposition Technologies for Films and Coatings. Peter M. Martin.

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mtep111120-intro-and-surface-preparation-ch3.pdf (3.27 MB )