Sputter Deposition Processes
Week 3:
Topics: Sputter Deposition Processes
Book Readings: Chapter 5, pages 253-294. Handbook of Deposition Technologies for Films and Coatings. Peter M. Martin.
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Course Material
- Thin Film Physics-Surface Preparation
- Thin Film Physics-Surface Preparation2
- Sputter Deposition Processes
- Ion Plating
- Chemical Vapor Deposition
- Characterization of thin films and coatings. XPS, AES
- SIMS, SEM, STM, AFM
- Basics of XRD
- Construction and Operation of Differactometers
- Vacuum Physics. Vacuum Pumps
- Chapters 10
- Department Physics
- Teacher
Dr. Bilal Rasul
