Introduction

This is an introductory course to experimental plasma physics, with emphasis on low-temperature plasmas for different applications. Topics include: Characterization of the plasma state, Debye shielding, Collision processes, Creating low temperature plasma, Fluid equations, Particle Transport and Loss, Electrical breakdown, Townsend’s theory, DC discharges, Low temperature plasma sources and Applications.

Learning Outcomes

After completing this course, students should be able:

1. To describe, in words, the ways in which various concepts in low-temperature plasmas come into play in particular situations;
2. To develop skills of generation and characterization of low-temperature plasma sources.
3. To conduct research in low-temperature plasmas.

Textbooks

1. Physics of Radio-Frequency Plasmas, Pascal Chambert and Nicholas Braithwaite, Cambridge University Press, (2011).
2. Principles of Plasma Discharges and Materials Processing, M. A. Lieberman and A. J. Lichtenberg, John Wiley and Sons, (2005).
3. Lecture notes on Principles of Plasma Processing, Francis F Chen and J P Chang, Kluwer Academics/Plenum Publishers, (2003).
4. Industrial plasma engineering, J. Reece Roth, Vol I, IOP, (2001).
5. Cold Plasma in Materials Fabrication, Alfred Grill, IEEE press, (1993).
6. Gas Discharge Physics, Yuri P. Raizer, Springer-Verlag, (1991).
7. Glow Discharge Processes, by B. Chapman, John Wiley and Sons, (1980).

Assessment Criteria

Sessional:                     20 marks (Assignments 20 marks)

Mid Term exam:          30 marks

Final exam:                  50 marks

Day and time of classes

Monday (11:30 AM to 1:00 PM)

Tuesday (11:30 AM to 1:00 PM)